Beilstein J. Nanotechnol.2018,9, 890–899, doi:10.3762/bjnano.9.83
deposition process. This result is interpreted in the light of the contributions of different energy components (surface energy and elastic modulus) which act dependently on the substrate properties, such as its nature and structure.
Keywords: atomic layer deposition; cerium(IV) oxide (CeO2) microstructure
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Figure 1:
XRR experimental curves and data fitting of the (a) CeO2/TiN and (b) CeO2/Si: as deposited (blue sy...