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Search for "cerium(IV) oxide (CeO2) microstructure" in Full Text gives 1 result(s) in Beilstein Journal of Nanotechnology.

Effect of annealing treatments on CeO2 grown on TiN and Si substrates by atomic layer deposition

  • Silvia Vangelista,
  • Rossella Piagge,
  • Satu Ek and
  • Alessio Lamperti

Beilstein J. Nanotechnol. 2018, 9, 890–899, doi:10.3762/bjnano.9.83

Graphical Abstract
  • deposition process. This result is interpreted in the light of the contributions of different energy components (surface energy and elastic modulus) which act dependently on the substrate properties, such as its nature and structure. Keywords: atomic layer deposition; cerium(IV) oxide (CeO2) microstructure
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Published 15 Mar 2018
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